8/13/2011	7:49:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/13/2011	7:49:14 AM	Recipe started at 7:49 AM
8/13/2011	7:49:14 AM	Helium valve closed
8/13/2011	7:49:14 AM	H2 valve closed
8/13/2011	7:49:14 AM	BCl3 valve closed
8/13/2011	7:49:14 AM	PH3 valve closed
8/13/2011	7:49:14 AM	SiCl4 pre valve closed
8/13/2011	7:49:14 AM	SiCl4 post valve closed
8/13/2011	7:49:14 AM	Main Vac valve closed
8/13/2011	7:49:14 AM	Bypass valve closed
8/13/2011	7:49:14 AM	Bubbler valve closed
8/13/2011	7:49:14 AM	Helium MFC set to  0.000000
8/13/2011	7:49:14 AM	H2 MFC set to  0.000000
8/13/2011	7:49:14 AM	BCl3 MFC set to  0.000000
8/13/2011	7:49:14 AM	PHl3 MFC set to  0.000000
8/13/2011	7:49:14 AM	SiCl4 MFC set to  0.000000
8/13/2011	7:49:14 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	7:49:15 AM	Tube furnace set to 0
8/13/2011	7:49:18 AM	H2 valve closed
8/13/2011	7:49:18 AM	BCl3 valve closed
8/13/2011	7:49:18 AM	PH3 valve closed
8/13/2011	7:49:18 AM	SiCl4 pre valve closed
8/13/2011	7:49:18 AM	SiCl4 post valve closed
8/13/2011	7:49:18 AM	Main Vac valve closed
8/13/2011	7:49:18 AM	Bypass valve closed
8/13/2011	7:49:18 AM	Bubbler valve closed
8/13/2011	7:49:18 AM	Helium valve opened
8/13/2011	7:49:18 AM	Helium MFC set to  500.000000
8/13/2011	7:49:18 AM	H2 MFC set to  0.000000
8/13/2011	7:49:18 AM	BCl3 MFC set to  0.000000
8/13/2011	7:49:18 AM	PHl3 MFC set to  0.000000
8/13/2011	7:49:18 AM	SiCl4 MFC set to  0.000000
8/13/2011	7:49:18 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	7:49:18 AM	Tube furnace set to 0
8/13/2011	7:50:23 AM	Helium valve closed
8/13/2011	7:50:23 AM	H2 valve closed
8/13/2011	7:50:23 AM	BCl3 valve closed
8/13/2011	7:50:23 AM	PH3 valve closed
8/13/2011	7:50:23 AM	SiCl4 pre valve closed
8/13/2011	7:50:23 AM	SiCl4 post valve closed
8/13/2011	7:50:23 AM	Main Vac valve closed
8/13/2011	7:50:23 AM	Bypass valve closed
8/13/2011	7:50:23 AM	Bubbler valve closed
8/13/2011	7:50:23 AM	Helium MFC set to  0.000000
8/13/2011	7:50:23 AM	H2 MFC set to  0.000000
8/13/2011	7:50:23 AM	BCl3 MFC set to  0.000000
8/13/2011	7:50:23 AM	PHl3 MFC set to  0.000000
8/13/2011	7:50:23 AM	SiCl4 MFC set to  0.000000
8/13/2011	7:50:23 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	7:50:23 AM	Tube furnace set to 0
8/13/2011	7:50:24 AM	Run finished at 7:50 AM
8/13/2011	7:50:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/13/2011	8:13:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/13/2011	8:13:23 AM	Recipe started at 8:13 AM
8/13/2011	8:13:23 AM	Helium valve closed
8/13/2011	8:13:23 AM	H2 valve closed
8/13/2011	8:13:23 AM	BCl3 valve closed
8/13/2011	8:13:23 AM	PH3 valve closed
8/13/2011	8:13:23 AM	SiCl4 pre valve closed
8/13/2011	8:13:23 AM	SiCl4 post valve closed
8/13/2011	8:13:23 AM	Main Vac valve closed
8/13/2011	8:13:23 AM	Bubbler valve closed
8/13/2011	8:13:23 AM	Bypass valve opened
8/13/2011	8:13:23 AM	Helium MFC set to  0.000000
8/13/2011	8:13:23 AM	H2 MFC set to  0.000000
8/13/2011	8:13:23 AM	BCl3 MFC set to  0.000000
8/13/2011	8:13:23 AM	PHl3 MFC set to  0.000000
8/13/2011	8:13:23 AM	SiCl4 MFC set to  0.000000
8/13/2011	8:13:23 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	8:13:23 AM	Tube furnace set to 0
8/13/2011	8:14:16 AM	Helium valve closed
8/13/2011	8:14:16 AM	H2 valve closed
8/13/2011	8:14:16 AM	BCl3 valve closed
8/13/2011	8:14:16 AM	PH3 valve closed
8/13/2011	8:14:16 AM	SiCl4 pre valve closed
8/13/2011	8:14:16 AM	SiCl4 post valve closed
8/13/2011	8:14:16 AM	Main Vac valve closed
8/13/2011	8:14:16 AM	Bubbler valve closed
8/13/2011	8:14:16 AM	Bypass valve opened
8/13/2011	8:14:16 AM	Helium MFC set to  0.000000
8/13/2011	8:14:16 AM	H2 MFC set to  0.000000
8/13/2011	8:14:16 AM	BCl3 MFC set to  0.000000
8/13/2011	8:14:16 AM	PHl3 MFC set to  0.000000
8/13/2011	8:14:16 AM	SiCl4 MFC set to  0.000000
8/13/2011	8:14:16 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	8:14:16 AM	Tube furnace set to 0
8/13/2011	8:15:16 AM	Helium valve closed
8/13/2011	8:15:16 AM	H2 valve closed
8/13/2011	8:15:16 AM	BCl3 valve closed
8/13/2011	8:15:16 AM	PH3 valve closed
8/13/2011	8:15:16 AM	SiCl4 pre valve closed
8/13/2011	8:15:16 AM	SiCl4 post valve closed
8/13/2011	8:15:16 AM	Bypass valve closed
8/13/2011	8:15:16 AM	Bubbler valve closed
8/13/2011	8:15:16 AM	Main Vac valve opened
8/13/2011	8:15:16 AM	Helium MFC set to  0.000000
8/13/2011	8:15:16 AM	H2 MFC set to  0.000000
8/13/2011	8:15:16 AM	BCl3 MFC set to  0.000000
8/13/2011	8:15:16 AM	PHl3 MFC set to  0.000000
8/13/2011	8:15:16 AM	SiCl4 MFC set to  0.000000
8/13/2011	8:15:16 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	8:15:17 AM	Tube furnace set to 0
8/13/2011	8:15:18 AM	Run finished at 8:15 AM
8/13/2011	8:15:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/13/2011	9:27:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/13/2011	9:27:33 AM	Recipe started at 9:27 AM
8/13/2011	9:27:33 AM	Helium valve closed
8/13/2011	9:27:33 AM	H2 valve closed
8/13/2011	9:27:33 AM	BCl3 valve closed
8/13/2011	9:27:33 AM	PH3 valve closed
8/13/2011	9:27:33 AM	SiCl4 pre valve closed
8/13/2011	9:27:33 AM	SiCl4 post valve closed
8/13/2011	9:27:33 AM	Main Vac valve closed
8/13/2011	9:27:33 AM	Bypass valve closed
8/13/2011	9:27:33 AM	Bubbler valve closed
8/13/2011	9:27:33 AM	Helium MFC set to  0.000000
8/13/2011	9:27:33 AM	H2 MFC set to  0.000000
8/13/2011	9:27:33 AM	BCl3 MFC set to  0.000000
8/13/2011	9:27:33 AM	PHl3 MFC set to  0.000000
8/13/2011	9:27:33 AM	SiCl4 MFC set to  0.000000
8/13/2011	9:27:33 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	9:27:33 AM	Tube furnace set to 0
8/13/2011	9:27:36 AM	H2 valve closed
8/13/2011	9:27:36 AM	BCl3 valve closed
8/13/2011	9:27:36 AM	PH3 valve closed
8/13/2011	9:27:36 AM	SiCl4 pre valve closed
8/13/2011	9:27:36 AM	SiCl4 post valve closed
8/13/2011	9:27:36 AM	Main Vac valve closed
8/13/2011	9:27:36 AM	Bypass valve closed
8/13/2011	9:27:36 AM	Bubbler valve closed
8/13/2011	9:27:36 AM	Helium valve opened
8/13/2011	9:27:36 AM	Helium MFC set to  500.000000
8/13/2011	9:27:36 AM	H2 MFC set to  0.000000
8/13/2011	9:27:36 AM	BCl3 MFC set to  0.000000
8/13/2011	9:27:36 AM	PHl3 MFC set to  0.000000
8/13/2011	9:27:36 AM	SiCl4 MFC set to  0.000000
8/13/2011	9:27:36 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	9:27:36 AM	Tube furnace set to 0
8/13/2011	9:28:42 AM	Helium valve closed
8/13/2011	9:28:42 AM	H2 valve closed
8/13/2011	9:28:42 AM	BCl3 valve closed
8/13/2011	9:28:42 AM	PH3 valve closed
8/13/2011	9:28:42 AM	SiCl4 pre valve closed
8/13/2011	9:28:42 AM	SiCl4 post valve closed
8/13/2011	9:28:42 AM	Main Vac valve closed
8/13/2011	9:28:42 AM	Bypass valve closed
8/13/2011	9:28:42 AM	Bubbler valve closed
8/13/2011	9:28:42 AM	Helium MFC set to  0.000000
8/13/2011	9:28:42 AM	H2 MFC set to  0.000000
8/13/2011	9:28:42 AM	BCl3 MFC set to  0.000000
8/13/2011	9:28:42 AM	PHl3 MFC set to  0.000000
8/13/2011	9:28:42 AM	SiCl4 MFC set to  0.000000
8/13/2011	9:28:42 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	9:28:42 AM	Tube furnace set to 0
8/13/2011	9:28:43 AM	Run finished at 9:28 AM
8/13/2011	9:28:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/13/2011	9:36:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/13/2011	9:36:34 AM	Recipe started at 9:36 AM
8/13/2011	9:36:34 AM	Helium valve closed
8/13/2011	9:36:34 AM	H2 valve closed
8/13/2011	9:36:34 AM	BCl3 valve closed
8/13/2011	9:36:34 AM	PH3 valve closed
8/13/2011	9:36:34 AM	SiCl4 pre valve closed
8/13/2011	9:36:34 AM	SiCl4 post valve closed
8/13/2011	9:36:34 AM	Main Vac valve closed
8/13/2011	9:36:34 AM	Bubbler valve closed
8/13/2011	9:36:34 AM	Bypass valve opened
8/13/2011	9:36:34 AM	Helium MFC set to  0.000000
8/13/2011	9:36:34 AM	H2 MFC set to  0.000000
8/13/2011	9:36:34 AM	BCl3 MFC set to  0.000000
8/13/2011	9:36:34 AM	PHl3 MFC set to  0.000000
8/13/2011	9:36:34 AM	SiCl4 MFC set to  0.000000
8/13/2011	9:36:34 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	9:36:34 AM	Tube furnace set to 0
8/13/2011	9:37:41 AM	Helium valve closed
8/13/2011	9:37:41 AM	H2 valve closed
8/13/2011	9:37:41 AM	BCl3 valve closed
8/13/2011	9:37:41 AM	PH3 valve closed
8/13/2011	9:37:41 AM	SiCl4 pre valve closed
8/13/2011	9:37:41 AM	SiCl4 post valve closed
8/13/2011	9:37:41 AM	Main Vac valve closed
8/13/2011	9:37:41 AM	Bubbler valve closed
8/13/2011	9:37:41 AM	Bypass valve opened
8/13/2011	9:37:41 AM	Helium MFC set to  0.000000
8/13/2011	9:37:41 AM	H2 MFC set to  0.000000
8/13/2011	9:37:41 AM	BCl3 MFC set to  0.000000
8/13/2011	9:37:41 AM	PHl3 MFC set to  0.000000
8/13/2011	9:37:41 AM	SiCl4 MFC set to  0.000000
8/13/2011	9:37:41 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	9:37:41 AM	Tube furnace set to 0
8/13/2011	9:38:41 AM	Helium valve closed
8/13/2011	9:38:41 AM	H2 valve closed
8/13/2011	9:38:41 AM	BCl3 valve closed
8/13/2011	9:38:41 AM	PH3 valve closed
8/13/2011	9:38:41 AM	SiCl4 pre valve closed
8/13/2011	9:38:41 AM	SiCl4 post valve closed
8/13/2011	9:38:41 AM	Bypass valve closed
8/13/2011	9:38:41 AM	Bubbler valve closed
8/13/2011	9:38:41 AM	Main Vac valve opened
8/13/2011	9:38:41 AM	Helium MFC set to  0.000000
8/13/2011	9:38:41 AM	H2 MFC set to  0.000000
8/13/2011	9:38:41 AM	BCl3 MFC set to  0.000000
8/13/2011	9:38:41 AM	PHl3 MFC set to  0.000000
8/13/2011	9:38:41 AM	SiCl4 MFC set to  0.000000
8/13/2011	9:38:41 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	9:38:41 AM	Tube furnace set to 0
8/13/2011	9:38:42 AM	Run finished at 9:38 AM
8/13/2011	9:38:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/13/2011	9:39:43 AM	Main Vac valve closed
8/13/2011	9:39:56 AM	Main Vac valve opened
8/13/2011	9:41:57 AM	Recipe started at 9:41 AM
8/13/2011	9:41:57 AM	Helium valve closed
8/13/2011	9:41:57 AM	H2 valve closed
8/13/2011	9:41:57 AM	BCl3 valve closed
8/13/2011	9:41:57 AM	PH3 valve closed
8/13/2011	9:41:57 AM	SiCl4 pre valve closed
8/13/2011	9:41:57 AM	SiCl4 post valve closed
8/13/2011	9:41:57 AM	Main Vac valve closed
8/13/2011	9:41:57 AM	Bypass valve closed
8/13/2011	9:41:57 AM	Bubbler valve closed
8/13/2011	9:41:57 AM	Helium MFC set to  0.000000
8/13/2011	9:41:57 AM	H2 MFC set to  0.000000
8/13/2011	9:41:57 AM	BCl3 MFC set to  0.000000
8/13/2011	9:41:57 AM	PHl3 MFC set to  0.000000
8/13/2011	9:41:57 AM	SiCl4 MFC set to  0.000000
8/13/2011	9:41:57 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	9:41:57 AM	Tube furnace set to 0
8/13/2011	9:42:00 AM	Helium valve closed
8/13/2011	9:42:00 AM	BCl3 valve closed
8/13/2011	9:42:00 AM	PH3 valve closed
8/13/2011	9:42:00 AM	SiCl4 pre valve closed
8/13/2011	9:42:00 AM	SiCl4 post valve closed
8/13/2011	9:42:00 AM	Main Vac valve closed
8/13/2011	9:42:00 AM	Bypass valve closed
8/13/2011	9:42:00 AM	Bubbler valve closed
8/13/2011	9:42:00 AM	H2 valve opened
8/13/2011	9:42:00 AM	Helium MFC set to  0.000000
8/13/2011	9:42:00 AM	H2 MFC set to  500.000000
8/13/2011	9:42:00 AM	BCl3 MFC set to  0.000000
8/13/2011	9:42:00 AM	PHl3 MFC set to  0.000000
8/13/2011	9:42:00 AM	SiCl4 MFC set to  0.000000
8/13/2011	9:42:00 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	9:42:00 AM	Tube furnace set to 0
8/13/2011	9:43:07 AM	Helium valve closed
8/13/2011	9:43:07 AM	BCl3 valve closed
8/13/2011	9:43:07 AM	PH3 valve closed
8/13/2011	9:43:07 AM	SiCl4 pre valve closed
8/13/2011	9:43:07 AM	SiCl4 post valve closed
8/13/2011	9:43:07 AM	Main Vac valve closed
8/13/2011	9:43:07 AM	Bypass valve closed
8/13/2011	9:43:07 AM	H2 valve opened
8/13/2011	9:43:07 AM	Bubbler valve opened
8/13/2011	9:43:07 AM	Helium MFC set to  0.000000
8/13/2011	9:43:07 AM	H2 MFC set to  500.000000
8/13/2011	9:43:07 AM	BCl3 MFC set to  0.000000
8/13/2011	9:43:07 AM	PHl3 MFC set to  0.000000
8/13/2011	9:43:07 AM	SiCl4 MFC set to  0.000000
8/13/2011	9:43:07 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	9:43:08 AM	Tube furnace set to 0
8/13/2011	9:43:09 AM	Helium valve closed
8/13/2011	9:43:09 AM	BCl3 valve closed
8/13/2011	9:43:09 AM	PH3 valve closed
8/13/2011	9:43:09 AM	SiCl4 pre valve closed
8/13/2011	9:43:09 AM	SiCl4 post valve closed
8/13/2011	9:43:09 AM	Main Vac valve closed
8/13/2011	9:43:09 AM	Bypass valve closed
8/13/2011	9:43:09 AM	H2 valve opened
8/13/2011	9:43:09 AM	Bubbler valve opened
8/13/2011	9:43:09 AM	Helium MFC set to  0.000000
8/13/2011	9:43:09 AM	H2 MFC set to  500.000000
8/13/2011	9:43:09 AM	BCl3 MFC set to  0.000000
8/13/2011	9:43:09 AM	PHl3 MFC set to  0.000000
8/13/2011	9:43:09 AM	SiCl4 MFC set to  0.000000
8/13/2011	9:43:09 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	9:43:09 AM	Tube furnace set to 1000
8/13/2011	10:03:09 AM	Helium valve closed
8/13/2011	10:03:09 AM	BCl3 valve closed
8/13/2011	10:03:09 AM	PH3 valve closed
8/13/2011	10:03:09 AM	SiCl4 pre valve closed
8/13/2011	10:03:09 AM	SiCl4 post valve closed
8/13/2011	10:03:09 AM	Main Vac valve closed
8/13/2011	10:03:09 AM	Bypass valve closed
8/13/2011	10:03:09 AM	H2 valve opened
8/13/2011	10:03:09 AM	Bubbler valve opened
8/13/2011	10:03:09 AM	Helium MFC set to  0.000000
8/13/2011	10:03:09 AM	H2 MFC set to  500.000000
8/13/2011	10:03:09 AM	BCl3 MFC set to  0.000000
8/13/2011	10:03:09 AM	PHl3 MFC set to  0.000000
8/13/2011	10:03:09 AM	SiCl4 MFC set to  0.000000
8/13/2011	10:03:09 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	10:03:09 AM	Tube furnace set to 1000
8/13/2011	10:23:09 AM	Helium valve closed
8/13/2011	10:23:09 AM	PH3 valve closed
8/13/2011	10:23:09 AM	Main Vac valve closed
8/13/2011	10:23:09 AM	Bypass valve closed
8/13/2011	10:23:09 AM	H2 valve opened
8/13/2011	10:23:09 AM	BCl3 valve opened
8/13/2011	10:23:09 AM	SiCl4 pre valve opened
8/13/2011	10:23:09 AM	SiCl4 post valve opened
8/13/2011	10:23:09 AM	Bubbler valve opened
8/13/2011	10:23:09 AM	Helium MFC set to  0.000000
8/13/2011	10:23:09 AM	H2 MFC set to  500.000000
8/13/2011	10:23:09 AM	BCl3 MFC set to  2.500000
8/13/2011	10:23:09 AM	PHl3 MFC set to  0.000000
8/13/2011	10:23:09 AM	SiCl4 MFC set to  50.000000
8/13/2011	10:23:09 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	10:23:09 AM	Tube furnace set to 1000
8/13/2011	10:37:09 AM	Helium valve closed
8/13/2011	10:37:09 AM	BCl3 valve closed
8/13/2011	10:37:09 AM	PH3 valve closed
8/13/2011	10:37:09 AM	SiCl4 pre valve closed
8/13/2011	10:37:09 AM	SiCl4 post valve closed
8/13/2011	10:37:09 AM	Main Vac valve closed
8/13/2011	10:37:09 AM	Bypass valve closed
8/13/2011	10:37:09 AM	H2 valve opened
8/13/2011	10:37:09 AM	Bubbler valve opened
8/13/2011	10:37:09 AM	Helium MFC set to  0.000000
8/13/2011	10:37:09 AM	H2 MFC set to  500.000000
8/13/2011	10:37:09 AM	BCl3 MFC set to  0.000000
8/13/2011	10:37:09 AM	PHl3 MFC set to  0.000000
8/13/2011	10:37:09 AM	SiCl4 MFC set to  0.000000
8/13/2011	10:37:09 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	10:37:09 AM	Tube furnace set to 750
8/13/2011	10:42:09 AM	H2 valve closed
8/13/2011	10:42:09 AM	BCl3 valve closed
8/13/2011	10:42:09 AM	PH3 valve closed
8/13/2011	10:42:09 AM	SiCl4 pre valve closed
8/13/2011	10:42:09 AM	SiCl4 post valve closed
8/13/2011	10:42:09 AM	Main Vac valve closed
8/13/2011	10:42:09 AM	Bypass valve closed
8/13/2011	10:42:09 AM	Helium valve opened
8/13/2011	10:42:09 AM	Bubbler valve opened
8/13/2011	10:42:09 AM	Helium MFC set to  500.000000
8/13/2011	10:42:09 AM	H2 MFC set to  0.000000
8/13/2011	10:42:09 AM	BCl3 MFC set to  0.000000
8/13/2011	10:42:09 AM	PHl3 MFC set to  0.000000
8/13/2011	10:42:09 AM	SiCl4 MFC set to  0.000000
8/13/2011	10:42:09 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	10:42:09 AM	Tube furnace set to 0
8/13/2011	11:02:09 AM	Helium valve closed
8/13/2011	11:02:09 AM	H2 valve closed
8/13/2011	11:02:09 AM	BCl3 valve closed
8/13/2011	11:02:09 AM	PH3 valve closed
8/13/2011	11:02:09 AM	SiCl4 pre valve closed
8/13/2011	11:02:09 AM	SiCl4 post valve closed
8/13/2011	11:02:09 AM	Main Vac valve closed
8/13/2011	11:02:09 AM	Bypass valve closed
8/13/2011	11:02:09 AM	Bubbler valve closed
8/13/2011	11:02:09 AM	Helium MFC set to  0.000000
8/13/2011	11:02:09 AM	H2 MFC set to  0.000000
8/13/2011	11:02:09 AM	BCl3 MFC set to  0.000000
8/13/2011	11:02:09 AM	PHl3 MFC set to  0.000000
8/13/2011	11:02:09 AM	SiCl4 MFC set to  0.000000
8/13/2011	11:02:09 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	11:02:09 AM	Tube furnace set to 0
8/13/2011	11:02:10 AM	Run finished at 11:02 AM
8/13/2011	11:26:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/13/2011	11:26:50 AM	Recipe started at 11:26 AM
8/13/2011	11:26:50 AM	Helium valve closed
8/13/2011	11:26:50 AM	H2 valve closed
8/13/2011	11:26:50 AM	BCl3 valve closed
8/13/2011	11:26:50 AM	PH3 valve closed
8/13/2011	11:26:50 AM	SiCl4 pre valve closed
8/13/2011	11:26:50 AM	SiCl4 post valve closed
8/13/2011	11:26:50 AM	Main Vac valve closed
8/13/2011	11:26:50 AM	Bypass valve closed
8/13/2011	11:26:50 AM	Bubbler valve closed
8/13/2011	11:26:50 AM	Helium MFC set to  0.000000
8/13/2011	11:26:50 AM	H2 MFC set to  0.000000
8/13/2011	11:26:50 AM	BCl3 MFC set to  0.000000
8/13/2011	11:26:50 AM	PHl3 MFC set to  0.000000
8/13/2011	11:26:50 AM	SiCl4 MFC set to  0.000000
8/13/2011	11:26:50 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	11:26:50 AM	Tube furnace set to 0
8/13/2011	11:26:53 AM	H2 valve closed
8/13/2011	11:26:53 AM	BCl3 valve closed
8/13/2011	11:26:53 AM	PH3 valve closed
8/13/2011	11:26:53 AM	SiCl4 pre valve closed
8/13/2011	11:26:53 AM	SiCl4 post valve closed
8/13/2011	11:26:53 AM	Main Vac valve closed
8/13/2011	11:26:53 AM	Bypass valve closed
8/13/2011	11:26:53 AM	Bubbler valve closed
8/13/2011	11:26:53 AM	Helium valve opened
8/13/2011	11:26:53 AM	Helium MFC set to  500.000000
8/13/2011	11:26:53 AM	H2 MFC set to  0.000000
8/13/2011	11:26:53 AM	BCl3 MFC set to  0.000000
8/13/2011	11:26:53 AM	PHl3 MFC set to  0.000000
8/13/2011	11:26:53 AM	SiCl4 MFC set to  0.000000
8/13/2011	11:26:53 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	11:26:53 AM	Tube furnace set to 0
8/13/2011	11:26:59 AM	Helium valve closed
8/13/2011	11:26:59 AM	H2 valve closed
8/13/2011	11:26:59 AM	BCl3 valve closed
8/13/2011	11:26:59 AM	PH3 valve closed
8/13/2011	11:26:59 AM	SiCl4 pre valve closed
8/13/2011	11:26:59 AM	SiCl4 post valve closed
8/13/2011	11:26:59 AM	Main Vac valve closed
8/13/2011	11:26:59 AM	Bypass valve closed
8/13/2011	11:26:59 AM	Bubbler valve closed
8/13/2011	11:26:59 AM	Helium MFC set to  0.000000
8/13/2011	11:26:59 AM	H2 MFC set to  0.000000
8/13/2011	11:26:59 AM	BCl3 MFC set to  0.000000
8/13/2011	11:26:59 AM	PHl3 MFC set to  0.000000
8/13/2011	11:26:59 AM	SiCl4 MFC set to  0.000000
8/13/2011	11:26:59 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	11:27:00 AM	Tube furnace set to 0
8/13/2011	11:27:01 AM	Run finished at 11:27 AM
8/13/2011	11:27:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/13/2011	11:34:57 AM	Recipe started at 11:34 AM
8/13/2011	11:34:57 AM	Helium valve closed
8/13/2011	11:34:57 AM	H2 valve closed
8/13/2011	11:34:57 AM	BCl3 valve closed
8/13/2011	11:34:57 AM	PH3 valve closed
8/13/2011	11:34:57 AM	SiCl4 pre valve closed
8/13/2011	11:34:57 AM	SiCl4 post valve closed
8/13/2011	11:34:57 AM	Main Vac valve closed
8/13/2011	11:34:57 AM	Bubbler valve closed
8/13/2011	11:34:57 AM	Bypass valve opened
8/13/2011	11:34:57 AM	Helium MFC set to  0.000000
8/13/2011	11:34:57 AM	H2 MFC set to  0.000000
8/13/2011	11:34:57 AM	BCl3 MFC set to  0.000000
8/13/2011	11:34:57 AM	PHl3 MFC set to  0.000000
8/13/2011	11:34:57 AM	SiCl4 MFC set to  0.000000
8/13/2011	11:34:57 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	11:34:57 AM	Tube furnace set to 0
8/13/2011	11:36:12 AM	Helium valve closed
8/13/2011	11:36:12 AM	H2 valve closed
8/13/2011	11:36:12 AM	BCl3 valve closed
8/13/2011	11:36:12 AM	PH3 valve closed
8/13/2011	11:36:12 AM	SiCl4 pre valve closed
8/13/2011	11:36:12 AM	SiCl4 post valve closed
8/13/2011	11:36:12 AM	Main Vac valve closed
8/13/2011	11:36:12 AM	Bubbler valve closed
8/13/2011	11:36:12 AM	Bypass valve opened
8/13/2011	11:36:12 AM	Helium MFC set to  0.000000
8/13/2011	11:36:12 AM	H2 MFC set to  0.000000
8/13/2011	11:36:12 AM	BCl3 MFC set to  0.000000
8/13/2011	11:36:12 AM	PHl3 MFC set to  0.000000
8/13/2011	11:36:12 AM	SiCl4 MFC set to  0.000000
8/13/2011	11:36:12 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	11:36:12 AM	Tube furnace set to 0
8/13/2011	11:36:42 AM	Helium valve closed
8/13/2011	11:36:42 AM	H2 valve closed
8/13/2011	11:36:42 AM	BCl3 valve closed
8/13/2011	11:36:42 AM	PH3 valve closed
8/13/2011	11:36:42 AM	SiCl4 pre valve closed
8/13/2011	11:36:42 AM	SiCl4 post valve closed
8/13/2011	11:36:42 AM	Bypass valve closed
8/13/2011	11:36:42 AM	Bubbler valve closed
8/13/2011	11:36:42 AM	Main Vac valve opened
8/13/2011	11:36:42 AM	Helium MFC set to  0.000000
8/13/2011	11:36:42 AM	H2 MFC set to  0.000000
8/13/2011	11:36:42 AM	BCl3 MFC set to  0.000000
8/13/2011	11:36:42 AM	PHl3 MFC set to  0.000000
8/13/2011	11:36:42 AM	SiCl4 MFC set to  0.000000
8/13/2011	11:36:42 AM	Bypass solenoid MFC set to  0.000000
8/13/2011	11:36:42 AM	Tube furnace set to 0
8/13/2011	12:06:42 PM	H2 valve closed
8/13/2011	12:06:42 PM	BCl3 valve closed
8/13/2011	12:06:42 PM	PH3 valve closed
8/13/2011	12:06:42 PM	SiCl4 pre valve closed
8/13/2011	12:06:42 PM	SiCl4 post valve closed
8/13/2011	12:06:42 PM	Bypass valve closed
8/13/2011	12:06:42 PM	Bubbler valve closed
8/13/2011	12:06:42 PM	Helium valve opened
8/13/2011	12:06:42 PM	Main Vac valve opened
8/13/2011	12:06:42 PM	Helium MFC set to  20.000000
8/13/2011	12:06:42 PM	H2 MFC set to  0.000000
8/13/2011	12:06:42 PM	BCl3 MFC set to  0.000000
8/13/2011	12:06:42 PM	PHl3 MFC set to  0.000000
8/13/2011	12:06:42 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:06:42 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:06:42 PM	Tube furnace set to 0
8/13/2011	12:07:12 PM	Helium valve closed
8/13/2011	12:07:12 PM	H2 valve closed
8/13/2011	12:07:12 PM	BCl3 valve closed
8/13/2011	12:07:12 PM	PH3 valve closed
8/13/2011	12:07:12 PM	SiCl4 pre valve closed
8/13/2011	12:07:12 PM	SiCl4 post valve closed
8/13/2011	12:07:12 PM	Bypass valve closed
8/13/2011	12:07:12 PM	Bubbler valve closed
8/13/2011	12:07:12 PM	Main Vac valve opened
8/13/2011	12:07:12 PM	Helium MFC set to  0.000000
8/13/2011	12:07:12 PM	H2 MFC set to  0.000000
8/13/2011	12:07:12 PM	BCl3 MFC set to  0.000000
8/13/2011	12:07:12 PM	PHl3 MFC set to  0.000000
8/13/2011	12:07:12 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:07:12 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:07:12 PM	Tube furnace set to 0
8/13/2011	12:07:42 PM	H2 valve closed
8/13/2011	12:07:42 PM	BCl3 valve closed
8/13/2011	12:07:42 PM	PH3 valve closed
8/13/2011	12:07:42 PM	SiCl4 pre valve closed
8/13/2011	12:07:42 PM	SiCl4 post valve closed
8/13/2011	12:07:42 PM	Bypass valve closed
8/13/2011	12:07:42 PM	Bubbler valve closed
8/13/2011	12:07:42 PM	Helium valve opened
8/13/2011	12:07:42 PM	Main Vac valve opened
8/13/2011	12:07:42 PM	Helium MFC set to  20.000000
8/13/2011	12:07:42 PM	H2 MFC set to  0.000000
8/13/2011	12:07:42 PM	BCl3 MFC set to  0.000000
8/13/2011	12:07:42 PM	PHl3 MFC set to  0.000000
8/13/2011	12:07:42 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:07:42 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:07:43 PM	Tube furnace set to 0
8/13/2011	12:08:13 PM	Helium valve closed
8/13/2011	12:08:13 PM	H2 valve closed
8/13/2011	12:08:13 PM	BCl3 valve closed
8/13/2011	12:08:13 PM	PH3 valve closed
8/13/2011	12:08:13 PM	SiCl4 pre valve closed
8/13/2011	12:08:13 PM	SiCl4 post valve closed
8/13/2011	12:08:13 PM	Bypass valve closed
8/13/2011	12:08:13 PM	Bubbler valve closed
8/13/2011	12:08:13 PM	Main Vac valve opened
8/13/2011	12:08:13 PM	Helium MFC set to  0.000000
8/13/2011	12:08:13 PM	H2 MFC set to  0.000000
8/13/2011	12:08:13 PM	BCl3 MFC set to  0.000000
8/13/2011	12:08:13 PM	PHl3 MFC set to  0.000000
8/13/2011	12:08:13 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:08:13 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:08:13 PM	Tube furnace set to 0
8/13/2011	12:08:43 PM	H2 valve closed
8/13/2011	12:08:43 PM	BCl3 valve closed
8/13/2011	12:08:43 PM	PH3 valve closed
8/13/2011	12:08:43 PM	SiCl4 pre valve closed
8/13/2011	12:08:43 PM	SiCl4 post valve closed
8/13/2011	12:08:43 PM	Bypass valve closed
8/13/2011	12:08:43 PM	Bubbler valve closed
8/13/2011	12:08:43 PM	Helium valve opened
8/13/2011	12:08:43 PM	Main Vac valve opened
8/13/2011	12:08:43 PM	Helium MFC set to  20.000000
8/13/2011	12:08:43 PM	H2 MFC set to  0.000000
8/13/2011	12:08:43 PM	BCl3 MFC set to  0.000000
8/13/2011	12:08:43 PM	PHl3 MFC set to  0.000000
8/13/2011	12:08:43 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:08:43 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:08:43 PM	Tube furnace set to 0
8/13/2011	12:09:13 PM	Helium valve closed
8/13/2011	12:09:13 PM	H2 valve closed
8/13/2011	12:09:13 PM	BCl3 valve closed
8/13/2011	12:09:13 PM	PH3 valve closed
8/13/2011	12:09:13 PM	SiCl4 pre valve closed
8/13/2011	12:09:13 PM	SiCl4 post valve closed
8/13/2011	12:09:13 PM	Bypass valve closed
8/13/2011	12:09:13 PM	Bubbler valve closed
8/13/2011	12:09:13 PM	Main Vac valve opened
8/13/2011	12:09:13 PM	Helium MFC set to  0.000000
8/13/2011	12:09:13 PM	H2 MFC set to  0.000000
8/13/2011	12:09:13 PM	BCl3 MFC set to  0.000000
8/13/2011	12:09:13 PM	PHl3 MFC set to  0.000000
8/13/2011	12:09:13 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:09:13 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:09:13 PM	Tube furnace set to 0
8/13/2011	12:09:43 PM	H2 valve closed
8/13/2011	12:09:43 PM	BCl3 valve closed
8/13/2011	12:09:43 PM	PH3 valve closed
8/13/2011	12:09:43 PM	SiCl4 pre valve closed
8/13/2011	12:09:43 PM	SiCl4 post valve closed
8/13/2011	12:09:43 PM	Bypass valve closed
8/13/2011	12:09:43 PM	Bubbler valve closed
8/13/2011	12:09:43 PM	Helium valve opened
8/13/2011	12:09:43 PM	Main Vac valve opened
8/13/2011	12:09:43 PM	Helium MFC set to  20.000000
8/13/2011	12:09:43 PM	H2 MFC set to  0.000000
8/13/2011	12:09:43 PM	BCl3 MFC set to  0.000000
8/13/2011	12:09:43 PM	PHl3 MFC set to  0.000000
8/13/2011	12:09:43 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:09:43 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:09:43 PM	Tube furnace set to 0
8/13/2011	12:10:13 PM	Helium valve closed
8/13/2011	12:10:13 PM	H2 valve closed
8/13/2011	12:10:13 PM	BCl3 valve closed
8/13/2011	12:10:13 PM	PH3 valve closed
8/13/2011	12:10:13 PM	SiCl4 pre valve closed
8/13/2011	12:10:13 PM	SiCl4 post valve closed
8/13/2011	12:10:13 PM	Bypass valve closed
8/13/2011	12:10:13 PM	Bubbler valve closed
8/13/2011	12:10:13 PM	Main Vac valve opened
8/13/2011	12:10:13 PM	Helium MFC set to  0.000000
8/13/2011	12:10:13 PM	H2 MFC set to  0.000000
8/13/2011	12:10:13 PM	BCl3 MFC set to  0.000000
8/13/2011	12:10:13 PM	PHl3 MFC set to  0.000000
8/13/2011	12:10:13 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:10:13 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:10:14 PM	Tube furnace set to 0
8/13/2011	12:10:44 PM	H2 valve closed
8/13/2011	12:10:44 PM	BCl3 valve closed
8/13/2011	12:10:44 PM	PH3 valve closed
8/13/2011	12:10:44 PM	SiCl4 pre valve closed
8/13/2011	12:10:44 PM	SiCl4 post valve closed
8/13/2011	12:10:44 PM	Bypass valve closed
8/13/2011	12:10:44 PM	Bubbler valve closed
8/13/2011	12:10:44 PM	Helium valve opened
8/13/2011	12:10:44 PM	Main Vac valve opened
8/13/2011	12:10:44 PM	Helium MFC set to  20.000000
8/13/2011	12:10:44 PM	H2 MFC set to  0.000000
8/13/2011	12:10:44 PM	BCl3 MFC set to  0.000000
8/13/2011	12:10:44 PM	PHl3 MFC set to  0.000000
8/13/2011	12:10:44 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:10:44 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:10:44 PM	Tube furnace set to 0
8/13/2011	12:11:14 PM	Helium valve closed
8/13/2011	12:11:14 PM	H2 valve closed
8/13/2011	12:11:14 PM	BCl3 valve closed
8/13/2011	12:11:14 PM	PH3 valve closed
8/13/2011	12:11:14 PM	SiCl4 pre valve closed
8/13/2011	12:11:14 PM	SiCl4 post valve closed
8/13/2011	12:11:14 PM	Bypass valve closed
8/13/2011	12:11:14 PM	Bubbler valve closed
8/13/2011	12:11:14 PM	Main Vac valve opened
8/13/2011	12:11:14 PM	Helium MFC set to  0.000000
8/13/2011	12:11:14 PM	H2 MFC set to  0.000000
8/13/2011	12:11:14 PM	BCl3 MFC set to  0.000000
8/13/2011	12:11:14 PM	PHl3 MFC set to  0.000000
8/13/2011	12:11:14 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:11:14 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:11:14 PM	Tube furnace set to 0
8/13/2011	12:11:44 PM	H2 valve closed
8/13/2011	12:11:44 PM	BCl3 valve closed
8/13/2011	12:11:44 PM	PH3 valve closed
8/13/2011	12:11:44 PM	SiCl4 pre valve closed
8/13/2011	12:11:44 PM	SiCl4 post valve closed
8/13/2011	12:11:44 PM	Bypass valve closed
8/13/2011	12:11:44 PM	Bubbler valve closed
8/13/2011	12:11:44 PM	Helium valve opened
8/13/2011	12:11:44 PM	Main Vac valve opened
8/13/2011	12:11:44 PM	Helium MFC set to  20.000000
8/13/2011	12:11:44 PM	H2 MFC set to  0.000000
8/13/2011	12:11:44 PM	BCl3 MFC set to  0.000000
8/13/2011	12:11:44 PM	PHl3 MFC set to  0.000000
8/13/2011	12:11:44 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:11:44 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:11:44 PM	Tube furnace set to 0
8/13/2011	12:12:14 PM	Helium valve closed
8/13/2011	12:12:14 PM	H2 valve closed
8/13/2011	12:12:14 PM	BCl3 valve closed
8/13/2011	12:12:14 PM	PH3 valve closed
8/13/2011	12:12:14 PM	SiCl4 pre valve closed
8/13/2011	12:12:14 PM	SiCl4 post valve closed
8/13/2011	12:12:14 PM	Bypass valve closed
8/13/2011	12:12:14 PM	Bubbler valve closed
8/13/2011	12:12:14 PM	Main Vac valve opened
8/13/2011	12:12:14 PM	Helium MFC set to  0.000000
8/13/2011	12:12:14 PM	H2 MFC set to  0.000000
8/13/2011	12:12:14 PM	BCl3 MFC set to  0.000000
8/13/2011	12:12:14 PM	PHl3 MFC set to  0.000000
8/13/2011	12:12:14 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:12:14 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:12:14 PM	Tube furnace set to 0
8/13/2011	12:12:44 PM	H2 valve closed
8/13/2011	12:12:44 PM	BCl3 valve closed
8/13/2011	12:12:44 PM	PH3 valve closed
8/13/2011	12:12:44 PM	SiCl4 pre valve closed
8/13/2011	12:12:44 PM	SiCl4 post valve closed
8/13/2011	12:12:44 PM	Bypass valve closed
8/13/2011	12:12:44 PM	Bubbler valve closed
8/13/2011	12:12:44 PM	Helium valve opened
8/13/2011	12:12:44 PM	Main Vac valve opened
8/13/2011	12:12:44 PM	Helium MFC set to  20.000000
8/13/2011	12:12:44 PM	H2 MFC set to  0.000000
8/13/2011	12:12:44 PM	BCl3 MFC set to  0.000000
8/13/2011	12:12:44 PM	PHl3 MFC set to  0.000000
8/13/2011	12:12:44 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:12:44 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:12:45 PM	Tube furnace set to 0
8/13/2011	12:13:15 PM	Helium valve closed
8/13/2011	12:13:15 PM	H2 valve closed
8/13/2011	12:13:15 PM	BCl3 valve closed
8/13/2011	12:13:15 PM	PH3 valve closed
8/13/2011	12:13:15 PM	SiCl4 pre valve closed
8/13/2011	12:13:15 PM	SiCl4 post valve closed
8/13/2011	12:13:15 PM	Bypass valve closed
8/13/2011	12:13:15 PM	Bubbler valve closed
8/13/2011	12:13:15 PM	Main Vac valve opened
8/13/2011	12:13:15 PM	Helium MFC set to  0.000000
8/13/2011	12:13:15 PM	H2 MFC set to  0.000000
8/13/2011	12:13:15 PM	BCl3 MFC set to  0.000000
8/13/2011	12:13:15 PM	PHl3 MFC set to  0.000000
8/13/2011	12:13:15 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:13:15 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:13:15 PM	Tube furnace set to 0
8/13/2011	12:13:45 PM	H2 valve closed
8/13/2011	12:13:45 PM	BCl3 valve closed
8/13/2011	12:13:45 PM	PH3 valve closed
8/13/2011	12:13:45 PM	SiCl4 pre valve closed
8/13/2011	12:13:45 PM	SiCl4 post valve closed
8/13/2011	12:13:45 PM	Bypass valve closed
8/13/2011	12:13:45 PM	Bubbler valve closed
8/13/2011	12:13:45 PM	Helium valve opened
8/13/2011	12:13:45 PM	Main Vac valve opened
8/13/2011	12:13:45 PM	Helium MFC set to  20.000000
8/13/2011	12:13:45 PM	H2 MFC set to  0.000000
8/13/2011	12:13:45 PM	BCl3 MFC set to  0.000000
8/13/2011	12:13:45 PM	PHl3 MFC set to  0.000000
8/13/2011	12:13:45 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:13:45 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:13:45 PM	Tube furnace set to 0
8/13/2011	12:14:15 PM	Helium valve closed
8/13/2011	12:14:15 PM	H2 valve closed
8/13/2011	12:14:15 PM	BCl3 valve closed
8/13/2011	12:14:15 PM	PH3 valve closed
8/13/2011	12:14:15 PM	SiCl4 pre valve closed
8/13/2011	12:14:15 PM	SiCl4 post valve closed
8/13/2011	12:14:15 PM	Bypass valve closed
8/13/2011	12:14:15 PM	Bubbler valve closed
8/13/2011	12:14:15 PM	Main Vac valve opened
8/13/2011	12:14:15 PM	Helium MFC set to  0.000000
8/13/2011	12:14:15 PM	H2 MFC set to  0.000000
8/13/2011	12:14:15 PM	BCl3 MFC set to  0.000000
8/13/2011	12:14:15 PM	PHl3 MFC set to  0.000000
8/13/2011	12:14:15 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:14:15 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:14:15 PM	Tube furnace set to 0
8/13/2011	12:14:45 PM	H2 valve closed
8/13/2011	12:14:45 PM	BCl3 valve closed
8/13/2011	12:14:45 PM	PH3 valve closed
8/13/2011	12:14:45 PM	SiCl4 pre valve closed
8/13/2011	12:14:45 PM	SiCl4 post valve closed
8/13/2011	12:14:45 PM	Bypass valve closed
8/13/2011	12:14:45 PM	Bubbler valve closed
8/13/2011	12:14:45 PM	Helium valve opened
8/13/2011	12:14:45 PM	Main Vac valve opened
8/13/2011	12:14:45 PM	Helium MFC set to  20.000000
8/13/2011	12:14:45 PM	H2 MFC set to  0.000000
8/13/2011	12:14:45 PM	BCl3 MFC set to  0.000000
8/13/2011	12:14:45 PM	PHl3 MFC set to  0.000000
8/13/2011	12:14:45 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:14:45 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:14:45 PM	Tube furnace set to 0
8/13/2011	12:15:15 PM	Helium valve closed
8/13/2011	12:15:15 PM	H2 valve closed
8/13/2011	12:15:15 PM	BCl3 valve closed
8/13/2011	12:15:15 PM	PH3 valve closed
8/13/2011	12:15:15 PM	SiCl4 pre valve closed
8/13/2011	12:15:15 PM	SiCl4 post valve closed
8/13/2011	12:15:15 PM	Bypass valve closed
8/13/2011	12:15:15 PM	Bubbler valve closed
8/13/2011	12:15:15 PM	Main Vac valve opened
8/13/2011	12:15:15 PM	Helium MFC set to  0.000000
8/13/2011	12:15:15 PM	H2 MFC set to  0.000000
8/13/2011	12:15:15 PM	BCl3 MFC set to  0.000000
8/13/2011	12:15:15 PM	PHl3 MFC set to  0.000000
8/13/2011	12:15:15 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:15:15 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:15:16 PM	Tube furnace set to 0
8/13/2011	12:15:46 PM	H2 valve closed
8/13/2011	12:15:46 PM	BCl3 valve closed
8/13/2011	12:15:46 PM	PH3 valve closed
8/13/2011	12:15:46 PM	SiCl4 pre valve closed
8/13/2011	12:15:46 PM	SiCl4 post valve closed
8/13/2011	12:15:46 PM	Bypass valve closed
8/13/2011	12:15:46 PM	Bubbler valve closed
8/13/2011	12:15:46 PM	Helium valve opened
8/13/2011	12:15:46 PM	Main Vac valve opened
8/13/2011	12:15:46 PM	Helium MFC set to  20.000000
8/13/2011	12:15:46 PM	H2 MFC set to  0.000000
8/13/2011	12:15:46 PM	BCl3 MFC set to  0.000000
8/13/2011	12:15:46 PM	PHl3 MFC set to  0.000000
8/13/2011	12:15:46 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:15:46 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:15:46 PM	Tube furnace set to 0
8/13/2011	12:16:16 PM	Helium valve closed
8/13/2011	12:16:16 PM	H2 valve closed
8/13/2011	12:16:16 PM	BCl3 valve closed
8/13/2011	12:16:16 PM	PH3 valve closed
8/13/2011	12:16:16 PM	SiCl4 pre valve closed
8/13/2011	12:16:16 PM	SiCl4 post valve closed
8/13/2011	12:16:16 PM	Bypass valve closed
8/13/2011	12:16:16 PM	Bubbler valve closed
8/13/2011	12:16:16 PM	Main Vac valve opened
8/13/2011	12:16:16 PM	Helium MFC set to  0.000000
8/13/2011	12:16:16 PM	H2 MFC set to  0.000000
8/13/2011	12:16:16 PM	BCl3 MFC set to  0.000000
8/13/2011	12:16:16 PM	PHl3 MFC set to  0.000000
8/13/2011	12:16:16 PM	SiCl4 MFC set to  0.000000
8/13/2011	12:16:16 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	12:16:16 PM	Tube furnace set to 0
8/13/2011	12:16:17 PM	Run finished at 12:16 PM
8/13/2011	1:06:17 PM	Main Vac valve closed
8/13/2011	1:06:26 PM	Main Vac valve opened
8/13/2011	1:06:40 PM	Recipe started at 1:06 PM
8/13/2011	1:06:40 PM	Helium valve closed
8/13/2011	1:06:40 PM	H2 valve closed
8/13/2011	1:06:40 PM	BCl3 valve closed
8/13/2011	1:06:40 PM	PH3 valve closed
8/13/2011	1:06:40 PM	SiCl4 pre valve closed
8/13/2011	1:06:40 PM	SiCl4 post valve closed
8/13/2011	1:06:40 PM	Main Vac valve closed
8/13/2011	1:06:40 PM	Bypass valve closed
8/13/2011	1:06:40 PM	Bubbler valve closed
8/13/2011	1:06:40 PM	Helium MFC set to  0.000000
8/13/2011	1:06:40 PM	H2 MFC set to  0.000000
8/13/2011	1:06:40 PM	BCl3 MFC set to  0.000000
8/13/2011	1:06:40 PM	PHl3 MFC set to  0.000000
8/13/2011	1:06:40 PM	SiCl4 MFC set to  0.000000
8/13/2011	1:06:40 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	1:06:40 PM	Tube furnace set to 0
8/13/2011	1:06:43 PM	Helium valve closed
8/13/2011	1:06:43 PM	BCl3 valve closed
8/13/2011	1:06:43 PM	PH3 valve closed
8/13/2011	1:06:43 PM	SiCl4 pre valve closed
8/13/2011	1:06:43 PM	SiCl4 post valve closed
8/13/2011	1:06:43 PM	Main Vac valve closed
8/13/2011	1:06:43 PM	Bypass valve closed
8/13/2011	1:06:43 PM	Bubbler valve closed
8/13/2011	1:06:43 PM	H2 valve opened
8/13/2011	1:06:43 PM	Helium MFC set to  0.000000
8/13/2011	1:06:43 PM	H2 MFC set to  500.000000
8/13/2011	1:06:43 PM	BCl3 MFC set to  0.000000
8/13/2011	1:06:43 PM	PHl3 MFC set to  0.000000
8/13/2011	1:06:43 PM	SiCl4 MFC set to  0.000000
8/13/2011	1:06:43 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	1:06:43 PM	Tube furnace set to 0
8/13/2011	1:07:49 PM	Helium valve closed
8/13/2011	1:07:49 PM	BCl3 valve closed
8/13/2011	1:07:49 PM	PH3 valve closed
8/13/2011	1:07:49 PM	SiCl4 pre valve closed
8/13/2011	1:07:49 PM	SiCl4 post valve closed
8/13/2011	1:07:49 PM	Main Vac valve closed
8/13/2011	1:07:49 PM	Bypass valve closed
8/13/2011	1:07:49 PM	H2 valve opened
8/13/2011	1:07:49 PM	Bubbler valve opened
8/13/2011	1:07:49 PM	Helium MFC set to  0.000000
8/13/2011	1:07:49 PM	H2 MFC set to  500.000000
8/13/2011	1:07:49 PM	BCl3 MFC set to  0.000000
8/13/2011	1:07:49 PM	PHl3 MFC set to  0.000000
8/13/2011	1:07:49 PM	SiCl4 MFC set to  0.000000
8/13/2011	1:07:49 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	1:07:49 PM	Tube furnace set to 0
8/13/2011	1:07:50 PM	Helium valve closed
8/13/2011	1:07:50 PM	BCl3 valve closed
8/13/2011	1:07:50 PM	PH3 valve closed
8/13/2011	1:07:50 PM	SiCl4 pre valve closed
8/13/2011	1:07:50 PM	SiCl4 post valve closed
8/13/2011	1:07:50 PM	Main Vac valve closed
8/13/2011	1:07:50 PM	Bypass valve closed
8/13/2011	1:07:50 PM	H2 valve opened
8/13/2011	1:07:50 PM	Bubbler valve opened
8/13/2011	1:07:50 PM	Helium MFC set to  0.000000
8/13/2011	1:07:50 PM	H2 MFC set to  500.000000
8/13/2011	1:07:50 PM	BCl3 MFC set to  0.000000
8/13/2011	1:07:50 PM	PHl3 MFC set to  0.000000
8/13/2011	1:07:50 PM	SiCl4 MFC set to  0.000000
8/13/2011	1:07:50 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	1:07:50 PM	Tube furnace set to 1000
8/13/2011	1:27:50 PM	Helium valve closed
8/13/2011	1:27:50 PM	BCl3 valve closed
8/13/2011	1:27:50 PM	PH3 valve closed
8/13/2011	1:27:50 PM	SiCl4 pre valve closed
8/13/2011	1:27:50 PM	SiCl4 post valve closed
8/13/2011	1:27:50 PM	Main Vac valve closed
8/13/2011	1:27:50 PM	Bypass valve closed
8/13/2011	1:27:50 PM	H2 valve opened
8/13/2011	1:27:50 PM	Bubbler valve opened
8/13/2011	1:27:50 PM	Helium MFC set to  0.000000
8/13/2011	1:27:50 PM	H2 MFC set to  500.000000
8/13/2011	1:27:50 PM	BCl3 MFC set to  0.000000
8/13/2011	1:27:50 PM	PHl3 MFC set to  0.000000
8/13/2011	1:27:50 PM	SiCl4 MFC set to  0.000000
8/13/2011	1:27:50 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	1:27:50 PM	Tube furnace set to 1000
8/13/2011	1:47:50 PM	Helium valve closed
8/13/2011	1:47:50 PM	PH3 valve closed
8/13/2011	1:47:50 PM	Main Vac valve closed
8/13/2011	1:47:50 PM	Bypass valve closed
8/13/2011	1:47:50 PM	H2 valve opened
8/13/2011	1:47:50 PM	BCl3 valve opened
8/13/2011	1:47:50 PM	SiCl4 pre valve opened
8/13/2011	1:47:50 PM	SiCl4 post valve opened
8/13/2011	1:47:50 PM	Bubbler valve opened
8/13/2011	1:47:50 PM	Helium MFC set to  0.000000
8/13/2011	1:47:50 PM	H2 MFC set to  500.000000
8/13/2011	1:47:50 PM	BCl3 MFC set to  2.500000
8/13/2011	1:47:50 PM	PHl3 MFC set to  0.000000
8/13/2011	1:47:50 PM	SiCl4 MFC set to  50.000000
8/13/2011	1:47:50 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	1:47:50 PM	Tube furnace set to 1000
8/13/2011	2:01:50 PM	Helium valve closed
8/13/2011	2:01:50 PM	BCl3 valve closed
8/13/2011	2:01:50 PM	PH3 valve closed
8/13/2011	2:01:50 PM	SiCl4 pre valve closed
8/13/2011	2:01:50 PM	SiCl4 post valve closed
8/13/2011	2:01:50 PM	Main Vac valve closed
8/13/2011	2:01:50 PM	Bypass valve closed
8/13/2011	2:01:50 PM	H2 valve opened
8/13/2011	2:01:50 PM	Bubbler valve opened
8/13/2011	2:01:50 PM	Helium MFC set to  0.000000
8/13/2011	2:01:50 PM	H2 MFC set to  500.000000
8/13/2011	2:01:50 PM	BCl3 MFC set to  0.000000
8/13/2011	2:01:50 PM	PHl3 MFC set to  0.000000
8/13/2011	2:01:50 PM	SiCl4 MFC set to  0.000000
8/13/2011	2:01:50 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	2:01:50 PM	Tube furnace set to 750
8/13/2011	2:06:50 PM	H2 valve closed
8/13/2011	2:06:50 PM	BCl3 valve closed
8/13/2011	2:06:50 PM	PH3 valve closed
8/13/2011	2:06:51 PM	SiCl4 pre valve closed
8/13/2011	2:06:51 PM	SiCl4 post valve closed
8/13/2011	2:06:51 PM	Main Vac valve closed
8/13/2011	2:06:51 PM	Bypass valve closed
8/13/2011	2:06:51 PM	Helium valve opened
8/13/2011	2:06:51 PM	Bubbler valve opened
8/13/2011	2:06:51 PM	Helium MFC set to  500.000000
8/13/2011	2:06:51 PM	H2 MFC set to  0.000000
8/13/2011	2:06:51 PM	BCl3 MFC set to  0.000000
8/13/2011	2:06:51 PM	PHl3 MFC set to  0.000000
8/13/2011	2:06:51 PM	SiCl4 MFC set to  0.000000
8/13/2011	2:06:51 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	2:06:51 PM	Tube furnace set to 0
8/13/2011	2:26:51 PM	Helium valve closed
8/13/2011	2:26:51 PM	H2 valve closed
8/13/2011	2:26:51 PM	BCl3 valve closed
8/13/2011	2:26:51 PM	PH3 valve closed
8/13/2011	2:26:51 PM	SiCl4 pre valve closed
8/13/2011	2:26:51 PM	SiCl4 post valve closed
8/13/2011	2:26:51 PM	Main Vac valve closed
8/13/2011	2:26:51 PM	Bypass valve closed
8/13/2011	2:26:51 PM	Bubbler valve closed
8/13/2011	2:26:51 PM	Helium MFC set to  0.000000
8/13/2011	2:26:51 PM	H2 MFC set to  0.000000
8/13/2011	2:26:51 PM	BCl3 MFC set to  0.000000
8/13/2011	2:26:51 PM	PHl3 MFC set to  0.000000
8/13/2011	2:26:51 PM	SiCl4 MFC set to  0.000000
8/13/2011	2:26:51 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	2:26:51 PM	Tube furnace set to 0
8/13/2011	2:26:52 PM	Run finished at 2:26 PM
8/13/2011	2:57:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/13/2011	2:57:03 PM	Recipe started at 2:57 PM
8/13/2011	2:57:03 PM	Helium valve closed
8/13/2011	2:57:03 PM	H2 valve closed
8/13/2011	2:57:03 PM	BCl3 valve closed
8/13/2011	2:57:03 PM	PH3 valve closed
8/13/2011	2:57:03 PM	SiCl4 pre valve closed
8/13/2011	2:57:03 PM	SiCl4 post valve closed
8/13/2011	2:57:03 PM	Main Vac valve closed
8/13/2011	2:57:03 PM	Bypass valve closed
8/13/2011	2:57:03 PM	Bubbler valve closed
8/13/2011	2:57:03 PM	Helium MFC set to  0.000000
8/13/2011	2:57:03 PM	H2 MFC set to  0.000000
8/13/2011	2:57:03 PM	BCl3 MFC set to  0.000000
8/13/2011	2:57:03 PM	PHl3 MFC set to  0.000000
8/13/2011	2:57:03 PM	SiCl4 MFC set to  0.000000
8/13/2011	2:57:03 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	2:57:04 PM	Tube furnace set to 0
8/13/2011	2:57:07 PM	H2 valve closed
8/13/2011	2:57:07 PM	BCl3 valve closed
8/13/2011	2:57:07 PM	PH3 valve closed
8/13/2011	2:57:07 PM	SiCl4 pre valve closed
8/13/2011	2:57:07 PM	SiCl4 post valve closed
8/13/2011	2:57:07 PM	Main Vac valve closed
8/13/2011	2:57:07 PM	Bypass valve closed
8/13/2011	2:57:07 PM	Bubbler valve closed
8/13/2011	2:57:07 PM	Helium valve opened
8/13/2011	2:57:07 PM	Helium MFC set to  500.000000
8/13/2011	2:57:07 PM	H2 MFC set to  0.000000
8/13/2011	2:57:07 PM	BCl3 MFC set to  0.000000
8/13/2011	2:57:07 PM	PHl3 MFC set to  0.000000
8/13/2011	2:57:07 PM	SiCl4 MFC set to  0.000000
8/13/2011	2:57:07 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	2:57:07 PM	Tube furnace set to 0
8/13/2011	2:57:14 PM	Helium valve closed
8/13/2011	2:57:14 PM	H2 valve closed
8/13/2011	2:57:14 PM	BCl3 valve closed
8/13/2011	2:57:14 PM	PH3 valve closed
8/13/2011	2:57:14 PM	SiCl4 pre valve closed
8/13/2011	2:57:14 PM	SiCl4 post valve closed
8/13/2011	2:57:14 PM	Main Vac valve closed
8/13/2011	2:57:14 PM	Bypass valve closed
8/13/2011	2:57:14 PM	Bubbler valve closed
8/13/2011	2:57:14 PM	Helium MFC set to  0.000000
8/13/2011	2:57:14 PM	H2 MFC set to  0.000000
8/13/2011	2:57:14 PM	BCl3 MFC set to  0.000000
8/13/2011	2:57:14 PM	PHl3 MFC set to  0.000000
8/13/2011	2:57:14 PM	SiCl4 MFC set to  0.000000
8/13/2011	2:57:14 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	2:57:14 PM	Tube furnace set to 0
8/13/2011	2:57:15 PM	Run finished at 2:57 PM
8/13/2011	2:57:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/13/2011	2:59:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/13/2011	2:59:47 PM	Recipe started at 2:59 PM
8/13/2011	2:59:47 PM	Helium valve closed
8/13/2011	2:59:47 PM	H2 valve closed
8/13/2011	2:59:47 PM	BCl3 valve closed
8/13/2011	2:59:47 PM	PH3 valve closed
8/13/2011	2:59:47 PM	SiCl4 pre valve closed
8/13/2011	2:59:47 PM	SiCl4 post valve closed
8/13/2011	2:59:47 PM	Main Vac valve closed
8/13/2011	2:59:47 PM	Bubbler valve closed
8/13/2011	2:59:47 PM	Bypass valve opened
8/13/2011	2:59:47 PM	Helium MFC set to  0.000000
8/13/2011	2:59:47 PM	H2 MFC set to  0.000000
8/13/2011	2:59:47 PM	BCl3 MFC set to  0.000000
8/13/2011	2:59:47 PM	PHl3 MFC set to  0.000000
8/13/2011	2:59:47 PM	SiCl4 MFC set to  0.000000
8/13/2011	2:59:47 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	2:59:47 PM	Tube furnace set to 0
8/13/2011	3:00:51 PM	Helium valve closed
8/13/2011	3:00:51 PM	H2 valve closed
8/13/2011	3:00:51 PM	BCl3 valve closed
8/13/2011	3:00:51 PM	PH3 valve closed
8/13/2011	3:00:51 PM	SiCl4 pre valve closed
8/13/2011	3:00:51 PM	SiCl4 post valve closed
8/13/2011	3:00:51 PM	Main Vac valve closed
8/13/2011	3:00:51 PM	Bubbler valve closed
8/13/2011	3:00:51 PM	Bypass valve opened
8/13/2011	3:00:51 PM	Helium MFC set to  0.000000
8/13/2011	3:00:51 PM	H2 MFC set to  0.000000
8/13/2011	3:00:51 PM	BCl3 MFC set to  0.000000
8/13/2011	3:00:51 PM	PHl3 MFC set to  0.000000
8/13/2011	3:00:51 PM	SiCl4 MFC set to  0.000000
8/13/2011	3:00:51 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	3:00:51 PM	Tube furnace set to 0
8/13/2011	3:01:51 PM	Helium valve closed
8/13/2011	3:01:51 PM	H2 valve closed
8/13/2011	3:01:51 PM	BCl3 valve closed
8/13/2011	3:01:51 PM	PH3 valve closed
8/13/2011	3:01:51 PM	SiCl4 pre valve closed
8/13/2011	3:01:51 PM	SiCl4 post valve closed
8/13/2011	3:01:51 PM	Bypass valve closed
8/13/2011	3:01:51 PM	Bubbler valve closed
8/13/2011	3:01:51 PM	Main Vac valve opened
8/13/2011	3:01:51 PM	Helium MFC set to  0.000000
8/13/2011	3:01:51 PM	H2 MFC set to  0.000000
8/13/2011	3:01:51 PM	BCl3 MFC set to  0.000000
8/13/2011	3:01:51 PM	PHl3 MFC set to  0.000000
8/13/2011	3:01:51 PM	SiCl4 MFC set to  0.000000
8/13/2011	3:01:51 PM	Bypass solenoid MFC set to  0.000000
8/13/2011	3:01:51 PM	Tube furnace set to 0
8/13/2011	3:01:52 PM	Run finished at 3:01 PM
8/13/2011	3:01:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
